[I-8-5] Improving Optical Properties of Ge Layers Fabricated by Epitaxial Growth Combined with Ge Condensation

K. Oda^1,2,3、K. Tani^1,2,3、S. Saito^1,2,3、T. Okumura³、T. Ido^1,2,3 (1.PETRA、2.PECST、3.Hitachi Ltd. , Japan)

https://doi.org/10.7567/SSDM.2011.I-8-5