[I-8-5] Improving Optical Properties of Ge Layers Fabricated by Epitaxial Growth Combined with Ge Condensation

K. Oda^1,2,3, K. Tani^1,2,3, S. Saito^1,2,3, T. Okumura³, T. Ido^1,2,3 (1.PETRA, 2.PECST, 3.Hitachi Ltd. , Japan)

https://doi.org/10.7567/SSDM.2011.I-8-5