Analysis of Nanowire Dopant Incorporation and Distribution with Atom Probe Tomography and Nano Probe Scanning Auger Microscopy

J. Connell; U. Givan; J. S. Hammond; D. F. Paul; Y. Rosenwaks; L. J. Lauhon

doi:https://doi.org/10.7567/SSDM.2011.KM-4-1

2011 International Conference on Solid State Devices and Materials

2011年9月27日〜 2011年9月30日
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

[KM-4-1] Analysis of Nanowire Dopant Incorporation and Distribution with Atom Probe Tomography and Nano Probe Scanning Auger Microscopy

J. Connell¹、U. Givan^1,2、J. S. Hammond³、D. F. Paul³、Y. Rosenwaks²、L. J. Lauhon¹ (1.Northwestern Univ. , USA、2.Tel Aviv Univ. , Israel、3.Physical Electronics Inc. , USA)

https://doi.org/10.7567/SSDM.2011.KM-4-1

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