[L-2-6] Effect of Hydrogen Radical-Injection on Growth Property and Crystallinity of Microcrystalline Silicon Thin Film

Y. Abe¹, A. Fukushima¹, Y. Lu¹, K. Takeda¹, H. Kondo¹, K. Ishikawa¹, M. Sekine¹, M. Hori¹ (1.Nagoya Univ. , Japan)

https://doi.org/10.7567/SSDM.2011.L-2-6