[L-2-6] Effect of Hydrogen Radical-Injection on Growth Property and Crystallinity of Microcrystalline Silicon Thin Film

Y. Abe¹、A. Fukushima¹、Y. Lu¹、K. Takeda¹、H. Kondo¹、K. Ishikawa¹、M. Sekine¹、M. Hori¹ (1.Nagoya Univ. , Japan)

https://doi.org/10.7567/SSDM.2011.L-2-6