[L-9-3] Impact of light element impurities on crystalline defect generation in silicon substrate
T. Tachibana1, T. Sameshima1, T. Kojima2, K. Arafune3, K. Kakimoto4, Y. Miyamura5, H. Harada5, T. Sekiguchi5, Y. Ohshita2, A. Ogura1
(1.Meiji Univ., 2.Toyota Tech. Inst., 3.Univ. of Hyogo, 4.Kyusyu Univ., 5.NIMS , Japan)
https://doi.org/10.7567/SSDM.2011.L-9-3