Impact of light element impurities on crystalline defect generation in silicon substrate

T. Tachibana; T. Sameshima; T. Kojima; K. Arafune; K. Kakimoto; Y. Miyamura; H. Harada; T. Sekiguchi; Y. Ohshita; A. Ogura

doi:https://doi.org/10.7567/SSDM.2011.L-9-3

[L-9-3] Impact of light element impurities on crystalline defect generation in silicon substrate

T. Tachibana¹, T. Sameshima¹, T. Kojima², K. Arafune³, K. Kakimoto⁴, Y. Miyamura⁵, H. Harada⁵, T. Sekiguchi⁵, Y. Ohshita², A. Ogura¹ (1.Meiji Univ., 2.Toyota Tech. Inst., 3.Univ. of Hyogo, 4.Kyusyu Univ., 5.NIMS , Japan)

https://doi.org/10.7567/SSDM.2011.L-9-3

2011 International Conference on Solid State Devices and Materials

[L-9-3] Impact of light element impurities on crystalline defect generation in silicon substrate