Impact of light element impurities on crystalline defect generation in silicon substrate

T. Tachibana; T. Sameshima; T. Kojima; K. Arafune; K. Kakimoto; Y. Miyamura; H. Harada; T. Sekiguchi; Y. Ohshita; A. Ogura

doi:https://doi.org/10.7567/SSDM.2011.L-9-3

[L-9-3] Impact of light element impurities on crystalline defect generation in silicon substrate

T. Tachibana¹、T. Sameshima¹、T. Kojima²、K. Arafune³、K. Kakimoto⁴、Y. Miyamura⁵、H. Harada⁵、T. Sekiguchi⁵、Y. Ohshita²、A. Ogura¹ (1.Meiji Univ.、2.Toyota Tech. Inst.、3.Univ. of Hyogo、4.Kyusyu Univ.、5.NIMS , Japan)

https://doi.org/10.7567/SSDM.2011.L-9-3

2011 International Conference on Solid State Devices and Materials

[L-9-3] Impact of light element impurities on crystalline defect generation in silicon substrate