[L-9-5] Preparation of a Diameter-controlled Silicon Nanowire Array by Metal Assisted Chemical Etching using Silica Nanoparticles (MACES)

S. Kato¹、Y. Watanabe¹、Y. Kurokawa¹、A. Yamada¹、Y. Ohta²、Y. Niwa²、M. Hirota² (1.Tokyo Tech、2.Nissan Res. Center , Japan)

https://doi.org/10.7567/SSDM.2011.L-9-5