[M-1-3] Effect of Phase Purity on Dislocation Density of PR-MOVPE-Grown InN

T. Iwabuchi¹、Y. Liu^1,2、T. Kimura^1,2、Y. Zhang^1,2、K. Prasertsuk¹、R. Katayama^1,2、T. Matsuoka^1,2 (1.Tohoku Univ.、2.CREST-JST , Japan)

https://doi.org/10.7567/SSDM.2011.M-1-3