A Novel Chemical Lift-Off Process based on Embedded Nano-rods Template

S. S. Yen; W. Y. Chen; J. R. Chang; S. P. Chang; P. M. Tu; Y. C. Hsu; Y. J. Li; Y. C. Chen; K. P. Sou; C. Y. Chang

doi:https://doi.org/10.7567/SSDM.2011.M-1-6

2011 International Conference on Solid State Devices and Materials

2011年9月27日〜 2011年9月30日
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

[M-1-6] A Novel Chemical Lift-Off Process based on Embedded Nano-rods Template

S. S. Yen¹、W. Y. Chen¹、J. R. Chang¹、S. P. Chang¹、P. M. Tu¹、Y. C. Hsu¹、Y. J. Li¹、Y. C. Chen¹、K. P. Sou¹、C. Y. Chang¹ (1.National Chiao Tung Univ. , Taiwan)

https://doi.org/10.7567/SSDM.2011.M-1-6

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