A Novel Chemical Lift-Off Process based on Embedded Nano-rods Template

S. S. Yen; W. Y. Chen; J. R. Chang; S. P. Chang; P. M. Tu; Y. C. Hsu; Y. J. Li; Y. C. Chen; K. P. Sou; C. Y. Chang

doi:https://doi.org/10.7567/SSDM.2011.M-1-6

2011 International Conference on Solid State Devices and Materials

Sep 27, 2011 - Sep 30, 2011
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

[M-1-6] A Novel Chemical Lift-Off Process based on Embedded Nano-rods Template

S. S. Yen¹, W. Y. Chen¹, J. R. Chang¹, S. P. Chang¹, P. M. Tu¹, Y. C. Hsu¹, Y. J. Li¹, Y. C. Chen¹, K. P. Sou¹, C. Y. Chang¹ (1.National Chiao Tung Univ. , Taiwan)

https://doi.org/10.7567/SSDM.2011.M-1-6

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