[M-8-7] Boron and Carbon co-doping in high percentage Silicon-Germanium Alloys - Effects of Dopant Incorporation, Strain Compensation and Microstructure -
A. Reznicek1, T. Adam1, Z. Zhu1, J. Li1, R. Murphy1, S. W. Bedell1, V. Paruchuri1, D. K. Sadana1
(1.IBM , USA)
https://doi.org/10.7567/SSDM.2011.M-8-7