[M-9-3] Analysis of Atomic Arrangement at 3C-SiC/Si(001) Interface by Aberration-Corrected Transmission Electron Microscopy J. Yamasaki1、S. Inamoto1、H. Tamaki1、N. Tanaka1 (1.Nagoya Univ. , Japan) https://doi.org/10.7567/SSDM.2011.M-9-3