[M-9-3] Analysis of Atomic Arrangement at 3C-SiC/Si(001) Interface by Aberration-Corrected Transmission Electron Microscopy

J. Yamasaki¹, S. Inamoto¹, H. Tamaki¹, N. Tanaka¹ (1.Nagoya Univ. , Japan)

https://doi.org/10.7567/SSDM.2011.M-9-3