[P-1-1] High Quality Germanium Dioxide Formation using Damage-Free and Low-Temperature Neutral Beam Oxidation Process A. Wada1、K. Endo2、M. Masahara2、S. Samukawa1 (1.Tohoku Univ.、2.AIST , Japan) https://doi.org/10.7567/SSDM.2011.P-1-1