[P-1-1] High Quality Germanium Dioxide Formation using Damage-Free and Low-Temperature Neutral Beam Oxidation Process

A. Wada¹, K. Endo², M. Masahara², S. Samukawa¹ (1.Tohoku Univ., 2.AIST , Japan)

https://doi.org/10.7567/SSDM.2011.P-1-1