Enhanced Sidewall Growth (ESG) process: towards PEALD with conformality above 100%

2011 International Conference on Solid State Devices and Materials

Sep 27, 2011 - Sep 30, 2011
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

S. Ueda¹, A. Fukazawa¹, H. Fukuda¹, N. Kobayashi¹ (1.ASM Japan K.K. , Japan)