[P-1-14] Enhanced Sidewall Growth (ESG) process: towards PEALD with conformality above 100%

S. Ueda¹、A. Fukazawa¹、H. Fukuda¹、N. Kobayashi¹ (1.ASM Japan K.K. , Japan)

https://doi.org/10.7567/SSDM.2011.P-1-14