The Japan Society of Applied Physics

[P-1-15] Mean time to failure distribution in thin oxide film: Observation at nano and devices scale and modelling using a filamentary growth model

P. Delcroix1,2, S. Blonkowski1, M. Kogelschatz2, M. Rafik1 (1.STMicroelectronics, 2.CNRS , France)

https://doi.org/10.7567/SSDM.2011.P-1-15