[P-1-15] Mean time to failure distribution in thin oxide film: Observation at nano and devices scale and modelling using a filamentary growth model

P. Delcroix^1,2、S. Blonkowski¹、M. Kogelschatz²、M. Rafik¹ (1.STMicroelectronics、2.CNRS , France)

https://doi.org/10.7567/SSDM.2011.P-1-15