Fermi Level Depinning for Metal/Germanium Schottky Junction by CF<sub>4</sub> Plasma Treatment

2011 International Conference on Solid State Devices and Materials

Sep 27, 2011 - Sep 30, 2011
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

J. R. Wu¹, C. Y. Hou¹, M. L. Wu¹, C. C. Lin¹, L. L. Chen¹, Y. H. Wu¹ (1.National Tsing Hua Univ. , Taiwan)