Plasma Induced Damage Affecting Mechanical Properties of Silicon Microcantilevers and Effects of Thermal Annealing on Their Recovery

2011 International Conference on Solid State Devices and Materials

2011年9月27日〜 2011年9月30日
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

A. Wada¹、Y. Yanagisawa¹、M. Tomura¹、C. H. Huang¹、S. Yamasaki²、T. Ono¹、S. Samukawa¹ (1.Tohoku Univ.、2.AIST , Japan)