Plasma Induced Damage Affecting Mechanical Properties of Silicon Microcantilevers and Effects of Thermal Annealing on Their Recovery

2011 International Conference on Solid State Devices and Materials

Sep 27, 2011 - Sep 30, 2011
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

A. Wada¹, Y. Yanagisawa¹, M. Tomura¹, C. H. Huang¹, S. Yamasaki², T. Ono¹, S. Samukawa¹ (1.Tohoku Univ., 2.AIST , Japan)