Photoresist Spray Coating Using Aperture toward Trench-type 3D Microdevices

2011 International Conference on Solid State Devices and Materials

Sep 27, 2011 - Sep 30, 2011
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

N. Fukuda¹, S. Kumagai¹, M. Sasaki¹ (1.Toyota Technological Inst. , Japan)