[P-11-9] Acceleration Sensor Based on CMOS Inverter Having Force Balanced Movable Gate Electrode

M. Suzuki¹、J. Kogure¹、K. Kitamura¹、T. Takahashi¹、S. Yokoyama²、H. Tokunaga³、S. Aoyagi¹ (1.Kansai Univ.、2.Hiroshima Univ.、3.M. T. C. Corp. , Japan)

https://doi.org/10.7567/SSDM.2011.P-11-9