[P-14-20] Estimation of the Surface Recombination Velocity from Thickness Dependence of the Carrier Lifetime in n-type 4H-SiC Epilayers

M. Kato¹、A. Yoshida¹、M. Ichimura¹ (1.Nagoya Inst. of Tech. , Japan)

https://doi.org/10.7567/SSDM.2011.P-14-20