[P-2-13] Low-Energy Ion-Beam-Assisted Sputtering for Si Nanocrystals

C. Y. Hsiao¹、K. W. Su¹、K. T. Hung¹、H. T. Wu¹、H. J. Chen¹、S. W. Fu¹、S. H. Wu¹、C. F. Shih¹ (1.National Cheng Kung Univ. , Taiwan)

https://doi.org/10.7567/SSDM.2011.P-2-13