[P-2-4] Optimum Design of MEMS Resonator Array to Measure the Young's Modulus of Nano-Scale Thin Films for the Reliability of Semiconductor Devices

H. Yamagiwa¹、S. Ito¹、T. Namazu^1,2、T. Takeuchi³、K. Murakami³、Y. Kawashimo³、T. Takano⁴ (1.Univ. of Hyogo、2.PRESTO-JST、3.Shinko Seiki Co., Ltd.、4.The New Industry Research Organization , Japan)

https://doi.org/10.7567/SSDM.2011.P-2-4