[P-2-4] Optimum Design of MEMS Resonator Array to Measure the Young's Modulus of Nano-Scale Thin Films for the Reliability of Semiconductor Devices

H. Yamagiwa¹, S. Ito¹, T. Namazu^1,2, T. Takeuchi³, K. Murakami³, Y. Kawashimo³, T. Takano⁴ (1.Univ. of Hyogo, 2.PRESTO-JST, 3.Shinko Seiki Co., Ltd., 4.The New Industry Research Organization , Japan)

https://doi.org/10.7567/SSDM.2011.P-2-4