[P-2-5] A New Technique for in-Plane Poisson's Ratio Measurement of Thin Films - Cases of Single-Crystal Silicon and Aluminum Thin Films -

T. Fujii¹、T. Namazu^1,2、M. Takahashi¹、M. Tanaka¹、K. Yoshiki¹、S. Inoue¹ (1.Univ. of Hyogo、2.PRESTO-JST , Japan)

https://doi.org/10.7567/SSDM.2011.P-2-5