A New Technique for in-Plane Poisson&apos;s Ratio Measurement of Thin Films - Cases of Single-Crystal Silicon and Aluminum Thin Films -

2011 International Conference on Solid State Devices and Materials

Sep 27, 2011 - Sep 30, 2011
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

T. Fujii¹, T. Namazu^1,2, M. Takahashi¹, M. Tanaka¹, K. Yoshiki¹, S. Inoue¹ (1.Univ. of Hyogo, 2.PRESTO-JST , Japan)