[P-3-13] Stack Gate Technique for Feasible Bulk FinFETs

Y. B. Liao¹、M. H. Chiang²、W. C. Hsu¹、Y. S. Lai³、H. Li² (1.National Cheng Kung Univ.、2.National Ilan Univ.、3.National Nano Device Lab. , Taiwan)

https://doi.org/10.7567/SSDM.2011.P-3-13