[P-6-3] Electrical and Photo-response Properties of Titanium Contacts on n-type N-face and Ga-face GaN Layer for Vertical Power Devices Prepared by ELOG and Laser Lift-off

D. K. Kim¹、C. J. Lee¹、Y. J. Kwon¹、J. Y. Yun¹、D. S. Kim¹、H. B. Lee²、J. H. Lee¹、S. H. Hahm¹ (1.Kyungbook National Univ.、2.Samsung LED , Korea)

https://doi.org/10.7567/SSDM.2011.P-6-3