Electrical and Photo-response Properties of Titanium Contacts on n-type N-face and Ga-face GaN Layer for Vertical Power Devices Prepared by ELOG and Laser Lift-off

[P-6-3] Electrical and Photo-response Properties of Titanium Contacts on n-type N-face and Ga-face GaN Layer for Vertical Power Devices Prepared by ELOG and Laser Lift-off

D. K. Kim¹, C. J. Lee¹, Y. J. Kwon¹, J. Y. Yun¹, D. S. Kim¹, H. B. Lee², J. H. Lee¹, S. H. Hahm¹ (1.Kyungbook National Univ., 2.Samsung LED , Korea)