[P-6-8] Investigation of Plasma-Induced Damages in GaN with Different Processing

C. Y. Lee¹, H. Sekiguchi¹, H. Okada¹, A. Wakahara¹ (1.Toyohashi Univ. of Tech. , Japan)

https://doi.org/10.7567/SSDM.2011.P-6-8