[P-7-17] Fabrication and Characterization of InGaAs/InAlAs Multiple FACQW Structures with Larger Tolerance to Impurity in Intrinsic Layer Y. Amma1, T. Arakawa1 (1.Yokohama National Univ. , Japan) https://doi.org/10.7567/SSDM.2011.P-7-17