[P-7-24] Periodic Arrangement of Au Nanoparticles on SOI Photodiode for Absorption Enhancement

A. Ono¹、H. Satoh¹、R. Kawai¹、H. Inokawa¹ (1.Shizuoka Univ. , Japan)

https://doi.org/10.7567/SSDM.2011.P-7-24