[P-7-25] Enhanced Light Sensitivity of Thin SOI Photodiode by Metal Line-and-Space Grating of Various Materials

H. Satoh¹、H. Inokawa¹、A. Ono¹ (1.Shizuoka Univ. , Japan)

https://doi.org/10.7567/SSDM.2011.P-7-25