[P-8-12] Alignment of In-plane Crystallographic Grain Orientations in Polycrystalline Si Films by Normal and Oblique-Angle Ion-Implantations
A. Nakajima1, S. Kuroki2, S. Fujii2, T. Ito1
(1.Hiroshima Univ., 2.Tohoku Univ. , Japan)
https://doi.org/10.7567/SSDM.2011.P-8-12
