Field Emission Properties of 10-nm Pillars of Organics Fabricated by Pt particles and Plasma Etching

T. Suzuki; K. Takeda; H. Kondo; K. Ishikawa; Y. Setsuhara; M. Shiratani; M. Sekine; M. Hori

doi:https://doi.org/10.7567/SSDM.2011.P-8-3

2011 International Conference on Solid State Devices and Materials

Sep 27, 2011 - Sep 30, 2011
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

[P-8-3] Field Emission Properties of 10-nm Pillars of Organics Fabricated by Pt particles and Plasma Etching

T. Suzuki¹, K. Takeda^1,4, H. Kondo¹, K. Ishikawa¹, Y. Setsuhara^2,4, M. Shiratani^3,4, M. Sekine^1,4, M. Hori^1,4 (1.Nagoya Univ., 2.Osaka Univ., 3.Kyushu Univ., 4.CREST-JST , Japan)

https://doi.org/10.7567/SSDM.2011.P-8-3

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