The Japan Society of Applied Physics

[A-2-6] Fabrication of Er silicate crystalline waveguide by directed self-assembly approach using radical assisted sputtering

T. Nakajima1、T. Shinagawa1、T. Kimura1、H. Isshiki1、T. Sugawara2、Y. Jiang2 (1.Univ. of Electro-Communications、2.Shincron Co. Ltd. , Japan)

https://doi.org/10.7567/SSDM.2012.A-2-6