[C-1-5] Initial Growth Observation of Networked Nano Graphite on SiO2(90nm)/Si dependent on Process Gas Concentration

Y. Ojiro¹, S. Ogawa¹, M. Satou², M. Nihei², Y. Takakuwa¹, N. Yokoyama² (1.Tohoku Univ., 2.AIST/GNC , Japan)

https://doi.org/10.7567/SSDM.2012.C-1-5