[C-1-5] Initial Growth Observation of Networked Nano Graphite on SiO2(90nm)/Si dependent on Process Gas Concentration

Y. Ojiro¹、S. Ogawa¹、M. Satou²、M. Nihei²、Y. Takakuwa¹、N. Yokoyama² (1.Tohoku Univ.、2.AIST/GNC , Japan)

https://doi.org/10.7567/SSDM.2012.C-1-5