[C-5-1] Dependence of field effect mobility of CVD graphene on its grain size

K. Yagi¹、A. Yamada¹、K. Hayashi¹、N. Harada¹、M. Tsukahara²、S. Ogawa³、S. Sato¹、N. Yokoyama¹ (1.GNC-AIST、2.ICAN-AIST、3.NRI-AIST , Japan)

https://doi.org/10.7567/SSDM.2012.C-5-1