[D-2-1] Raman spectroscopy for strain measurement in state-of-the-art LSI

A. Ogura¹、D. Kosemura¹、M. Takei²、M. Tomita² (1.School of Science and Tech., Meiji Univ.、2.JSPS Research Fellow , Japan)

https://doi.org/10.7567/SSDM.2012.D-2-1