[D-2-1] Raman spectroscopy for strain measurement in state-of-the-art LSI

A. Ogura¹, D. Kosemura¹, M. Takei², M. Tomita² (1.School of Science and Tech., Meiji Univ., 2.JSPS Research Fellow , Japan)

https://doi.org/10.7567/SSDM.2012.D-2-1