[D-5-1] Dry Oxidation of Germanium (100) and (111) Surfaces - Impact of Oxidation Temperature on Ge Oxide Growth -

A. Ohta¹, S. K. Sahari¹, M. Ikeda¹, H. Murakami¹, S. Higashi¹, S. Miyazaki² (1.Hiroshima Univ., 2.Nagoya Univ. , Japan)

https://doi.org/10.7567/SSDM.2012.D-5-1