[D-5-1] Dry Oxidation of Germanium (100) and (111) Surfaces - Impact of Oxidation Temperature on Ge Oxide Growth -

A. Ohta¹、S. K. Sahari¹、M. Ikeda¹、H. Murakami¹、S. Higashi¹、S. Miyazaki² (1.Hiroshima Univ.、2.Nagoya Univ. , Japan)

https://doi.org/10.7567/SSDM.2012.D-5-1