[D-7-4] Quantitative Evaluation of Dopant Concentration in Shallow Silicon pn Junctions by Tunneling Current Mapping with Multimode Scanning Probe Microscopy

L. Bolotov^1,2、K. Fukuda²、H. Arimoto²、T. Tada²、T. Kanayama² (1.Univ. of Tsukuba、2.Nat. Inst. of Advanced Indus. Sci. and Tech. , Japan)

https://doi.org/10.7567/SSDM.2012.D-7-4